掺铝氧化锌薄膜的制备及应用研究进展  

Preparation and Application Progress on Zinc Oxide Film Doped with Aluminum

作　　者：李哲[1] 刘辉[2] 

机构地区：[1]重庆大学动力工程学院,重庆400030 [2]华北电力大学能源与动力工程学院,北京102206

出　　处：《云南化工》2008年第2期41-44,50,共5页Yunnan Chemical Technology

摘　　要：综述了掺铝氧化锌薄膜的各种制备方法,包括磁控溅射法、脉冲激光法和溶胶凝胶法等;重点分析了掺铝氧化锌(ZAO)薄膜的结构、导电机理及光电性能;最后对薄膜的存在问题和应用情况进行了分析。Preparation of zinc oxide film doped with aluminum was introduced, and its structure, conductive mechanism and photoelectric property were emphasized. The existing problem and application were also discussed.

关 键 词：掺铝 氧化锌 薄膜 光电性能 

分 类 号：TN304.21[电子电信—物理电子学] TB34[一般工业技术—材料科学与工程]