模板电解法快速制作玻璃微流控芯片  

Fabrication of Glass Microfluidic Chips By Electrochemical Micromachining

作　　者：叶嘉明[1] 李明佳[1] 庄金亮[1] 周勇亮[1] 

机构地区：[1]厦门大学化学化工学院化学系,化学生物学福建省重点实验室,厦门361005

出　　处：《功能材料与器件学报》2008年第2期491-495,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金资助项目(No.20675066);教育部留学回国人员科研启动基金资助项目

摘　　要：玻璃微流控芯片在许多领域已经得到较广泛的应用,但目前的加工需要繁琐的步骤及昂贵的设备进行图形转移及金属牺牲层开窗口。本文提出一种快速制作金属牺牲层图形窗口以用于玻璃微流控芯片加工的方法。以CO2激光直写加工PET膜模板,微细电解加工玻璃基片上的铬/金牺牲层快速获得窗口,湿法腐蚀及热键合制作玻璃微流控芯片。结果表明该法可在10秒内开窗口,电解加工过程使用的模板厚度、电解液组成及施加的压力与电压对窗口的质量都有显著影响。加工的微通道宽度为145μm,边缘整齐,宽度均匀,相对标准偏差为3.72%,深度25μm,底部平整度高,并成功用于氨基酸混合液的芯片毛细管电泳分离。同时使用该方法加工的金微电极阵列,电极宽度为100μm,最小间距可达100μm。Glass is a popular material for microfluidic chip, but its fabrication process includes pattern transferring and window -opening on sacrificial metal layer by photolithography is time consuming and high cost. Here a simple and rapid method for window - opening was developed. Cr/Au sacrificial film was developed by electrochemical micromachining using a PET through - mask ablated with CO2 laser system. Window -opening could be finished within 10 seconds, and its quality depends on the thickness of the PET mask , component of electrolyte, the pressure and electric voltage applied. The width and depth of the fabricated microchannel are 145μm and 25μm respectively, relative standard deviation is 3.72%. Electrophoretic separation of amino acid mixture Was carried out successfully using the fabricated glass chip. And gold microelectrode array with 100μm width and 100μm interval was fabricated by this methodtoo.

关 键 词：微流控芯片 微细电解加工 玻璃芯片 微电极 

分 类 号：TN405[电子电信—微电子学与固体电子学] TG662[金属学及工艺—金属切削加工及机床]