CO_2激光辅助加工PMMA微流控芯片中的重铸物现象  

Bulge formation of PMMA during CO_2 laser cutting of microfluidic chip

作　　者：祝连义[1] 刘冲[1] 李经民[1] 

机构地区：[1]辽宁省微纳米技术及系统重点实验室大连理工大学,大连116023

出　　处：《功能材料与器件学报》2008年第2期534-538,共5页Journal of Functional Materials and Devices

基　　金：国家重点基础研究发展计划"高性能微流控芯片/器件的制备方法及相关理论"(No.2007CB714502)

摘　　要：根据实验现象分析了CO2激光制作PMMA微流控芯片储液池过程中,材料的流动与变形过程,以及凸起重铸物形成对芯片制作的影响。考察了激光功率、扫描速度以及材料取向对流变行为的作用及其机理。实验中采用不同的激光光束功率以及扫描速度,分析热量吸收的大小对材料流动与变形的影响,比较了挤出PMMA在顺着挤出方向与垂直于挤出方向切割时实验结果的不同。CO2激光加工PMMA过程中,材料在激光的热作用下发生软化、熔化及汽化。软化材料在汽化材料产生的气体压力作用下发生流动与变形,形成了沟道表面的凸起重铸物。实验结果表明热量及材料内部存在的取向对其流动与变形及凸起重铸的形成起着重要的作用。This paper analyzes the flow behaviour and bulge formation of PMMA during CO2 laser fabrication of microfluidic chip according to the experimental results. The influence of beam power, cutting speed and material tropism on the bulge formation was investigated. In order to investigate the influence of heat absorbed on the flow behaviour, the beam power and cutting speed were changed. The difference of cutting along the extrusion direction and perpendicular to the extrusion direction was shown and analyzed. The flow and distortion of softened material under the pressure of vaporized gas lead to the bulge formation. The results showed that the heat and material tropism of extruded PMMA play an important role of flow and bugle formation.

关 键 词：CO2激光 PMMA微流控芯片 重铸物 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]