基于双电测组合法半导体材料电阻率测试仪的研制  

The Development of Semiconductor Material Resistivity and Conductivity Type Tester

作　　者：晏敏[1] 徐仁伯[1] 章兢[2] 侯志春[1] 何敏[2] 

机构地区：[1]湖南大学物理与微电子学院,长沙410082 [2]湖南大学电气与信息工程学院,长沙410082

出　　处：《宇航计测技术》2008年第2期50-53,共4页Journal of Astronautic Metrology and Measurement

基　　金：湖南省自然科学基金(05JJ305115)

摘　　要：采用双电测组合法设计了一款用于测试半导体材料方块电阻和体电阻率的测试仪,它是以凌阳单片机SPCE061A为控制核心,通过冗余通道法、PID算法和平均滤波法,提高了系统的测量准确度和智能化水平。实际运行结果表明:与传统直流四探针测试法相比,该双电测试法测量结果与探针间距无关,能自动修正边界误差和量程的转换,还可以测量材料的匀均性,较好地满足了生产与教学需要。A new two-sounding combination of semiconductor materials testing sheet resistance and resistivity,bnproved the traditional four- probe test. Using Sunplus SPCE061 A as the control core, combining software design and hardware designed a set of testing equipment to judging the conductivity type , sheet resistance and resistivity of semiconductor. Using redundant channel, PID algorithm and the average filtering improved the measurement accuracy and intelligent level. Actual operating results show ： the measurement results have nothing to do with the probe space; Can automatically correct boundary effects and automatically choice range, can meet the needs of production and teaching better.

关 键 词：+双电测组合法 半导体材料 电阻 电阻率 测量仪表 

分 类 号：TN385[电子电信—物理电子学]