干冰微粒喷射法清洗ITO玻璃的研究  

Carbon Dioxide Snow Jet Treatment on Surface Cleaning of Indium Tin Oxide Glass

作　　者：齐童[1] 李军建[1] 李树林[1] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《半导体光电》2008年第2期231-234,共4页Semiconductor Optoelectronics

基　　金：国家自然科学基金资助项目(60677011)

摘　　要：对干冰微粒喷射法和低频超声波法清洗ITO玻璃的效果进行了比较研究。用接触角测量仪、SEM和XPS测量了清洗前后ITO玻璃表面的浸润性、污染颗粒数量和元素成分及含量等洁净度指标。研究表明,与超声波法清洗相比,干冰微粒喷射法清洗可以使ITO玻璃表面的接触角更小,有机碳含量减少40.5%,污染颗粒数量也显著减少,是一种清洗ITO玻璃的有效方法。Studies on the effectiveness of carbon dioxide snow jet cleaning and lowfrequency ultrasonic cleaning in cleaning indium tin oxide（ITO） glass were carried out. The contact angle, the contaminate particles and the content of chemical element on ITO glass surface were measured before and after cleaning with contact angle goniometer, SEM and XPS. These studies have shown that the carbon dioxide snow jet cleaning caused the ITO glass surface contact angle to reduce, the organic carbon content reduced 40.5%, and the contaminate particles also remarkably reduced compared with the ultrasonic wave cleaning. Carbon dioxide snow jet cleaning is an effective method of cleaning ITO glass.

关 键 词：ITO 干冰微粒喷射法 低频超声法 清洗 

分 类 号：TN305.2[电子电信—物理电子学]