微型旋转机械轴承研究进展  

PROGRESS OF BEARINGS IN MICRO ROTATING MACHINERY

作　　者：张文明[1] 孟光[1] 陈迪[2] 

机构地区：[1]上海交通大学机械系统与振动国家重点实验室,上海200240 [2]上海交通大学微纳科学研究院,上海200030

出　　处：《振动与冲击》2008年第5期27-31,共5页Journal of Vibration and Shock

基　　金：国家杰出青年基金项目(10325209);国家自然科学基金项目(10602033和50575132);中国博士后基金项目(20060400165)

摘　　要：对微机电系统(MEMS)旋转机械微轴承,尤其是微型干摩擦、电磁和气体轴承的研究现状进行评述,介绍微型干摩擦轴承、微型电磁轴承及微型气体轴承的各种润滑特性,主要分析微型气体轴承的设计、加工制造及动力润滑特性问题,分别探讨微尺度效应和滑流效应对微型气体轴承润滑特性的影响,并对相关领域的研究进展进行展望。The current state and progress of the studies on micro-bearings in micro-electro-mechanical systems (MEMS), particularly in the micro dry friction bearing, micro magnetic bearing and micro gas bearing are summarized in detail. Various lubricating properties of the micro dry friction bearing, micro magnetic bearing and micro gas bearing are introduced and the design, fabrication and manufacture, and dynamic characteristics of the micro gas bearing are described. The micro scaling effect and slip effect on the characteristics of the micro gas bearing are discussed with regared to the lubricated behaviors often met in MEMS. Furthermore, a prospect is also provided concerning further work on micro-bearings in micro rotating machinery.

关 键 词：微机电系统(MEMS) 干摩擦轴承 电磁轴承 气体轴承 微尺度效应 滑流效应 

分 类 号：TH117.2[机械工程—机械设计及理论] TH133