钛合金表面磁控溅射制备HA／YSZ梯度涂层  

HA/YSZ Gradient Coating on Ti-alloy Substrate Prepared by RF Magnetron Sputtering

作　　者：林东洋 赵玉涛[1] 甘俊旗[2] 程晓农[1] 戴起勋[1] 

机构地区：[1]江苏大学材料科学与工程学院,江苏镇江212013 [2]广西大学物理科学与工程技术学院,南宁530004

出　　处：《材料工程》2008年第5期34-38,共5页Journal of Materials Engineering

基　　金：江苏省自然科学基金项目(BK2003051);江苏省复合材料工程技术研究中心研发项目(BM2003014)

摘　　要：采用射频磁控溅射法在Ti6Al4V基体上制备了HA/YSZ生物梯度涂层。借助于XRD,SEM,EDS等对溅射涂层的相组成、微观形貌和界面状态进行了研究。实验结果表明:磁控溅射的生物梯度涂层呈非晶态,经过退火处理,可以使其转化为晶态,恢复缺失的OH-1;梯度涂层的微观表面凹凸不平,并呈现网状结构和较多的孔隙,后处理仍保持梯度涂层利于新骨生长的表面形貌,并使其转变为针状结晶。HA/YSZ梯度涂层与基体结合紧密,在涂层与基体界面结合处约5.0μm范围内存在Ti,Ca,P,Zr的相互扩散层,梯度涂层与基体的界面结合强度达60.5MPa。HA/YSZ bioactive gradient coatings were prepared on Ti6Al4V substrates by radio frequency magnetron sputtering. The surface and interface morphologies, phase composition and chemical structure of these gradient coatings were characterized by SEM, EDS, and XRD. The results showed that the amorphous coating deposited by RF magnetron sputter can be transferred into the crystalline structure and restored OH ^-1 group by post-annealing. The surface morphology of gradient coatings was coarse and uneven with well-distributed concaves which will greatly increase the micro-surface area of coating. Furthermore, the surface of HA/YSZ gradient coating was converted into needle like crystals whose structure and composition were similar to that of natural bone by post-annealing treatment. There isn＇t any pore or crackle on the coating/substrate interface. The diffusion distribution of elements （such as Ti, Ca, P and Zr） in interfacial field indicated that there was a diffusion layer between HA/YSZ gradient coating and Ti6Al4V substrate. The thickness of the diffusion layer was about 5.0μm. Interfacial tensile test showed that the bonding strength was 60.5MPa.

关 键 词：HA梯度涂层 射频磁控溅射 微结构 结合强度 

分 类 号：TQ174[化学工程—陶瓷工业]