新型复合结构电热微驱动器的研制  

Development of novel composite structural electro-thermal actuator

作　　者：曾文光[1] 丁桂甫[1] 王艳[1] 付世[1] 蔡玉丽[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《传感器与微系统》2008年第5期117-120,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50675139)

摘　　要：在弯曲梁电热微驱动器原理的基础上,通过引入热膨胀系数更大的聚合物,提出了一种新型复合结构电热微驱动器。采用了ANSYS有限元分析软件,对其基本结构形式进行了系统的仿真分析,得到了一组初步优化的器件结构参数。仿真结果表明:新型电热微驱动器有更低的能耗和更大的位移。采用非硅表面微加工技术,成功制备了新型复合结构电热微驱动器。Based on the bent-beam electro-thermal actuator principle, polymer with large CTE is adopted and a novel composite structural electro-thermal actuator is prompted. Applying commercial FE software package （ANSYS）, its basic structure is systematically analysed and adequate manufacturing parameters are got. Simulation results show that this novel electro-thermal actuator has lower energy-consumption and larger displacement than the original bent-beam electro-thermal actuator. A novel composite structural electro-thermal actuator is fabricated by non-silicon surface machining.

关 键 词：聚合物 复合结构 电热微驱动器 有限元分析 非硅表面微加工 

分 类 号：TN603.5[电子电信—电路与系统]