超薄Ag膜的椭偏光谱建模及解谱  

Model Building and Optimization of Ultrathin Silver Films by Spectroscopic Ellipsometry

作　　者：曹春斌[1] 蔡琪[2] 宋学萍[2] 孙兆奇[2] 

机构地区：[1]安徽农业大学理学院,安徽合肥230036 [2]安徽大学物理与材料学院,安徽合肥230039

出　　处：《光谱学与光谱分析》2008年第5期995-998,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(59972001);教育部博士点专项基金项目(20060357003);安徽省高校省级自然科学基金项目(JK2008B015);安徽省人才专项基金项目(2004Z029);安徽大学人才队伍建设基金项目资助

摘　　要：用直流溅射法制备了6个不同厚度的超薄Ag膜。结合超薄Ag膜的结构特点，采用了Drude模型联合Lorentz Oscillator模型的解谱方法，得到1～6号样品的厚度分别为4．0，6．2，12．5，26．2，30．0和40．6nm。从拟合结果的消光系数k图谱中发现，在1号到4号样品中分别于430，450，560和570nm处出现了表面等离子体共振峰（SPR），随膜厚的增加共振峰宽化且峰位红移。最后，利用SPR理论计算出不同厚度Ag薄膜等离子体共振峰出现的位置，并和实验结果进行了比较。Ultrathin silver films （4. 0, 6. 2, 12.5, 26. 2, 30.0 and 40. 6 nm） were prepared by direct current sputtering deposition. The thicknesses and optical constants of the films were studied by spectroscopic ellipsometry. The Drude model combined with Lorentz Oscillator model was used in the optimization of the ellipsometrie data. The results show that surface plasma resonance absorption （SPR） peaks appear in the spectra of extinction coefficient k for samples 1, 2, 3 and 4. The peak shifts to shorter wavelength with the reduction in film thickness. The wavelengths of the SPR for different films were calculated by the SPR theory and also compared with the experimental data.

关 键 词：超薄Ag膜 椭偏数据解谱 表面等离子体共振吸收 

分 类 号：O484[理学—固体物理]