超声键合换能系统俯仰振动实验研究  

Experimental Studies of Pitching Vibration of Ultrasonic Bonder Transducer

作　　者：广明安[1] 韩雷[1] 

机构地区：[1]中南大学,长沙410083

出　　处：《中国机械工程》2008年第10期1228-1232,共5页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(50575230);国家重点基础研究发展计划资助项目(2003CB716202)

摘　　要：以超声键合换能系统为研究对象,分析了其俯仰振动对超声键合质量的影响。实验通过激光多普勒测速仪测得换能系统俯仰方向振动的前三阶固有频率,以及安装劈刀前后的前三阶固有频率。由实验结果的分析可知,实测换能系统的前三阶固有频率之比,与悬臂梁简化系统的前三阶固有频率之比大致吻合,表明换能系统俯仰振动的能量主要集中在第一阶固有频率处,劈刀的存在增加了换能系统主要能量集中点的耗散。Pitching vibration of ultrasonic bonding transducer can affect the bonding quality ot IC. We obtain the first three natural frequencies of structure of the ultrasonic bonding transducer through the experiments, and acquire the trends of these natural frequencies when fixing capillary. The results show that the ratio of the first three natural frequencies of ultrasonic bonding transducer accords approximately with the theoretic ratio of a cantilever beam. Conclusions can be drawn that energies of pitching vibration of the ultrasonic bonding transducer mostly focus on the first natural frequency,and that capillary can affect the natural frequencies and increase the energy dissipation of ultrasonic bonding transducer at the first natural frequency.

关 键 词：超声键合换能系统 悬臂梁 俯仰振动 劈刀 

分 类 号：TN305.96[电子电信—物理电子学]