衬底对V2O5薄膜微观结构的影响  

Effects of substrates on the microstructure of vanadium pentoxide thin films

作　　者：刘亚强[1] 刘雪芹[2] 

机构地区：[1]商丘师范学院物理与信息工程系,河南商丘476000 [2]兰州大学物理科学与技术学院,甘肃兰州730000

出　　处：《电子元件与材料》2008年第5期9-11,共3页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.50272027)

摘　　要：在常温下，用sol—gel法在普通玻璃和单晶Si衬底上制备了V2O5薄膜，并将样品在空气中于500℃进行热处理。通过XRD和SEM对比分析了不同衬底上样品的微观结构，用分光光度计测试了玻璃衬底上样品在350～850nm的光学特性。结果表明：在玻璃和Si衬底上分别得到了β-V2O5和β-V2O5薄膜，两种样品的纯度高、相结构单一和结晶度好。β-V2O5薄膜的光学带隙Eg为2．33eV。Vanadium pentoxide （V2O5） thin films were deposited on quartz glass and monocrystalline silicon substrates by sol-gel technique at room temperature. The deposited thin films were annealed at 500 ℃. The structural features and surface morphology were investigated by XRD and SEM, optical transmission and reflection characteristics were measured by spectro-scope at 350 - 850 nm. The results show that β-V2O5 and α-V2O5 thin films have high purity, monophase and good crystallinity. The optical band gap （Eg） of β-V2O5 thin film is about 2.33 eV.

关 键 词：无机非金属材料 V2O5薄膜 sol—gel 微结构 衬底 

分 类 号：O484.41[理学—固体物理]