厚灵敏层金硅面垒探测器  

Au-Si Surface Barrier Detectors with Thick Sensitive Layer

作　　者：王柱生[1] 李存璠[1] 赵荣璞[1] 谭继廉[1] 

机构地区：[1]中国科学院近代物理研究所

出　　处：《核电子学与探测技术》1990年第3期146-149,共4页Nuclear Electronics & Detection Technology

摘　　要：本文介绍了最大耗尽厚度达5mm,最大有效面积为80—153mm^2的厚灵敏层金硅面垒探测器研制工艺,主要用途和测试结果。In order to meet the needs of nuclear physics experiments, Au-Si surface barrier detectors having sensitive layer thicknes of 5 mm and active area of 80-153mm2 have been developed. This kind of detector can be used for the measurements of α-particle, proton, β-particle and γ-rays with law energy.The technology and test results of the detector are described briefly in this paper.

关 键 词：面垒 灵敏层 探测器 半导体 单晶硅 

分 类 号：TL814[核科学技术—核技术及应用]