A high precision profilometer based on vertical scanning microscopic interferometry  

作　　者：戴蓉 谢铁邦 龚文 常素萍 

机构地区：[1]School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, P. R. China [2]School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan 430070, P. R. China

出　　处：《Journal of Shanghai University(English Edition)》2008年第3期255-260,共6页上海大学学报（英文版）

基　　金：Project supported by the National Natural Science Foundation of China （Grant No.50175037）

摘　　要：A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.

关 键 词：PROFILOMETER vertical scanning microscopic interferometry （VSMI） interference microscope work stage piezo- electric （PZT） actuator flexural hinge 

分 类 号：TH744.3[机械工程—光学工程]