一种新型压阻式硅微仿生矢量水听器的设计  

Design of a Novel Si-Based Bionic Vector Hydrophone Based on Piezoresistive Effect

作　　者：乔慧[1] 刘俊[1,2] 张斌珍[1] 张文栋[1] 熊继军[1] 薛晨阳[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,太原030051 [2]加州伯克利大学机械工程系,伯克利美国CA94720

出　　处：《传感技术学报》2008年第2期301-304,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(50405025,50535030);新世纪优秀人才支持计划资助(NCET-04-0259)

摘　　要：介绍了一种新型的基于压阻效应的硅微仿生矢量水听器,详细叙述了该矢量水听器的结构设计方法,利用有限元软件ANSYS对矢量水听器结构进行了模态分析,采用振动台标定与低频校准装置测试相结合的方法对水听器进行测试,并给出了检测单元的加速度频响特性曲线和声压灵敏度曲线,以及矢量水听器在水下测试的接收灵敏度曲线和指向性图的测试结果。通过此实验方法,不仅验证了该矢量水听器设计的合理性,而且验证了它适用于低频检测,应用于水声探测具有一定的可行性。实验证明,该矢量水听器的接收灵敏度在500Hz时达到-189.6dB(0dB=1V/μPa),并具有良好的"8"字形的指向性。According to principle of piezoresistive effect, a novel bionic vector hydrophone based on silicon is designed. The design method of the vector hydrophone is introduced. The modality analysis has been used to the structure by ANSYS. The properties of the vector hydrophones has been measured both by vibration table and in calibration device at low-frequency. The measurement results on vibration table, the acceleration frequency response and sound pressure sensitivity are showed. In addition, the receiving sensitivity and directional pattern calibrated in the special device are also listed. By means of the measurement, the results not only prove the design method is justifiable, but also verify the vector hydrophone will be used to low-frequency acoustic measurement is feasible. It is proved that the receiving sensitivity of the vector hydrophone is -189. 6 dB（0 dB=1 V/μPa） when it is tested at 500 Hz, which process directional pattern in form of ＂8＂-shape.

关 键 词：矢量水听器 压阻式 接收灵敏度 指向性 

分 类 号：TB565.1[交通运输工程—水声工程]