介电泳操控纳米材料及其在微纳传感器中的应用  

Dielectrophoresis of Nano-Materials and Application to Fabrication of Micro-/Nano-Sensor

作　　者：刘伟景[1] 张健[1] 万丽娟[1] 蒋珂玮[1] 吕家云[2] 

机构地区：[1]华东师范大学电子系,传感技术国家重点实验室,上海200062 [2]巢湖学院物理系,安徽巢湖238000

出　　处：《传感技术学报》2008年第1期17-22,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(60672002);上海市浦江人才计划资助(06PJ14037);传感技术国家重点实验室开放课题支持(基于纳米ZnO技术的高性能气体传感器)

摘　　要：要将纳米结构作为功能元件应用在微纳传感器、纳米电路等系统中,首先要解决材料的定位操作问题。在自行设计的几种电极的基础上,采用介电泳技术对SiO2微纳米材料进行操控,可以实现材料的沿电场方向的排布和电极间的跨接,为解决纳米结构的定位操作做了有益的尝试。初步测试了采用介电泳技术操控自行生长的ZnO纳米结构制作而成的湿度传感器的基本特性并取得很好的响应,表明介电泳技术可以很好得实现纳米材料在传感器领域中的应用。One of the key problems of nano-structured materials for electronic device applications in micro-/ nano-sensors and circuits is to align and manipulate them to the preset locations. With several home-made electrode pairs, we succeeded in manipulating the SiO2 micro-/nano-particles along the electric field and de- posited them across the gaps between two electrodes. It is proven a helpful experiment to precisely assem- ble of the nano-structures. A relative humidity sensor, using the dielectrophoretically located self-grown ZnO nano-materials as sensing elements, had been fabricated and the sensing properties had been tested. It confirms the dielectrophoresis can fulfill the application of nano-materials in the field of sensors.

关 键 词：微纳传感器 介电泳 定位操控 相对湿度 纳米氧化锌 

分 类 号：TB383[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]