微光学陀螺波导谐振腔的优化设计  

Optimal Design of Optical Waveguide Resonator for MOG

作　　者：冯丽爽[1] 于怀勇[1] 洪灵菲[1] 杨德伟[1] 杜哲峰[1] 

机构地区：[1]北京航空航天大学光电技术研究所精密光机电一体化技术教育部重点实验室,北京100083

出　　处：《传感技术学报》2008年第3期504-508,共5页Chinese Journal of Sensors and Actuators

摘　　要：提出一种应用于微型光学陀螺的谐振腔的优化设计方案,优化设计方案同时兼顾微型光学陀螺精度要求与其系统微型化设计。光波导材料为传输损耗为0.01dB/cm的硅基二氧化硅材料,有效的降低了谐振腔内部的损耗,使得谐振腔内损耗仅为0.5dB,利于谐振腔的高精度;光波导结构采用准单模矩形结构,利用腔中的弯曲波导对一阶模的有效滤除实现了光的基模传输,利于谐振腔的小型化;此外分析了波导的传输损耗、波导耦合器分光比对谐振腔性能及陀螺极限灵敏度的影响,得出波导耦合器分光比的优化参数,并仿真得到谐振腔的谐振清晰度达到70以上。假定在激光光源线宽为30kHz,探测器响应度0.95A/W,积分时间为10s的条件下,仿真得到系统的极限灵敏度为1.6°/h左右。最后实验验证了此优化设计方法是有效可行的。An optimized resonator was proposed to ensure remaining the MOG （Micro-Optical Gyroscope） characteristics of high temperature stability and miniaturization. The resonator loss was less than 0. 5 dB by using the SiO2 on Silicon substrate whose transmission loss is 0. 01 dB/cm. The finesse of the resonator was ensured. The structure of quasi-single mode waveguide can transmit fundamental mode and first-order mode. Curve waveguide filtered first-order mode so that only the fundamental mode transmitted in the resonator. Analysis is made to the influence of waveguide＇s transmission lose and coupler＇s coupling ratio on the resonator finesse and IOG fundamental detection limit The resonator finesse is above 60 after optimized design of coupler. And the fundamental detection limit is about 1.6°/h on condition that laser line-width is 30 kHz, detector responsibility is 0. 95A/W and integral time is 10s. Finally, this method was validated effectively and practically by experimentation.

关 键 词：微光学陀螺 耦合器 谐振腔 硅基二氧化硅 

分 类 号：V241.59[航空宇航科学与技术—飞行器设计]