轮廓仪在柱面镜检测中的应用  

Application of Profilometer to Testing Cylindrical Mirror

作　　者：程子清[1] 袁顺山[1] 

机构地区：[1]华中光电技术研究所,湖北武汉430073

出　　处：《光学与光电技术》2008年第3期67-71,共5页Optics & Optoelectronic Technology

摘　　要：目前柱面镜检测的主要方法是样板比较法和干涉法。样板法对球面、柱面样板均有较高要求,而干涉法也需合适的高要求的辅助镜,并且对环境要求较严格。提出了用轮廓仪配用合适工装检测柱面镜的方法,该方法简洁、直观、快速,对环境要求较低。分析了该方法的检测误差,实验验证了分析的正确性,指出高精度轮廓仪在一定范围内能保证柱面镜的检测精度。这种方法不仅适用于零件的最终检测,也适用于加工过程中的检测。Recently the main test methods for cylindrical mirror are template comparison measurement and interference measurement. The template measurement requires high quality spherical template or cylindrical template. And the interference measurement needs appropriate high quality assistant lens and environment. A test method for cylindrical mirror using profilometer with appropriate jig is put forward. This method is concise and quick, and the environment requirement is ordinary. The test error of the method is analyzed. It is proved with experiment that the analysis is right. This method is applicable not only to the final test of accessory but also to the process test.

关 键 词：柱面镜 轮廓仪 检测 检测误差 

分 类 号：TN741.3[电子电信—电路与系统]