液流悬浮超光滑加工中流体动压力对加工效果的影响  

Fluid pressure and its effect on hydrodynamic suspension ultra-smooth machining

作　　者：曹志强[1] 詹建明[2] 朱崇涛[3] 赵继[3] 

机构地区：[1]中国科学院电工研究所应用超导重点实验室,北京100080 [2]宁波大学工学院,浙江宁波315211 [3]吉林大学机械科学与工程学院,吉林长春130022

出　　处：《光学精密工程》2008年第6期1069-1074,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.50705044)

摘　　要：建立了基于数控装备的液流悬浮超光滑加工系统，研制了可控制加工压力的柔顺加工装置。应用流体动压理论分析了液流悬浮超光滑加工过程中的流体动压力分布规律，研究了工具转速和加工间隙对流体动压力的影响规律，并通过实验得到了加工间隙和流体动压力对加工效果的影响规律。结果表明，随着工具转速的提高，流体动压力逐步增大，在工具转速为6000r／min左右时，流体动压力达到最大值，然后又逐渐减小。随着加工间隙的增大，流体动压力逐步降低，并最终趋于稳定。加工间隙在5～40μm时，加工效果比较明显。在工具转速为6000r／min左右、加工间隙在10μm附近时，流体动压力增强为5N左右，加工效果最佳。A hydrodynamic suspension machining system based on digital machine tool was constructed,and a compliant machining apparatus for controlling mechining pressure was developed. Fluid pressure distribution in the machining clearance was analyzed by hydrodynamic theory. An experiment was carried out to obtain influence of machining clearance and motor rotate speed on fluid pressure. Meanwhile,the correlation between the surface roughness of machining clearance and motor rotate speed was revealed by conducting experiments. The experimental results indicate that the fluid pressure increases gradually with increasing of motor rotate speed and decreasing of machining clearance, and then,it decreases relatively after reaching a certain value. When the motor rotate speed is 6 000 r/min,the hydrodynamic pressure shows the maximum value. It also indicates that when the machining clearance is between 5 μm and 40 μm, the machining shows an effect distinctly. In the condition of maintaining clearance of 10 μm and hydrodynamic pressure of 5 N,the machining effect is optimal.

关 键 词：超光滑加工 液流悬浮 流体动压力 加工效果 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN305