Fe-RE磁性多层膜的结构稳定性研究  

Study on Structural Stability of Fe RE Magnetic Multilayer Films

作　　者：李胜利[1] 王佩璇[2] 马如璋[2] 

机构地区：[1]山东工业大学材料系 [2]北京科技大学

出　　处：《中国稀土学报》1997年第3期202-207,共6页Journal of the Chinese Society of Rare Earths

摘　　要：用真空双源蒸镀法在ＮａＣｌ和Ｓｉ单晶衬底上沉积了ＲＥＦｅ（ＲＥ：Ｄｙ、Ｙ）成分调制多层膜，借助透射电子显微镜（ＴＥＭ）热台及真空退火方式研究了多层膜受热过程中的结构变化规律。受热温度≤２００℃时，多层膜各单层的非晶结构不发生显著变化，且成分调制结构不被破坏，因此，可以认为非晶单层的多层膜在２００℃以下的结构是稳定的。Fe RE(RE∶Dy、Y) multilayer films were prepared by vacuum evaporating deposition of the two elements onto Si or NaCl single crystal substrate. The changes in structure of the films were analyzed by TEM in situ hot stage and were studied by XRD after vacuum annealing. It was found that,annealing at temperature ≤200 ℃ for a long time(～300 min),the amorphous state and the modulated structure of as deposited films remained and basically unchanged. It was suggested that Fe RE multilayer films were stable at temperature up to 200 ℃.

关 键 词：结构稳定性 磁性多层膜 铁 铼 磁性薄膜 薄膜 

分 类 号：O482.54[一般工业技术—材料科学与工程] O484.1[理学—固体物理]