单根ZnO纳米线的室温气敏特性  

Gas Sensing Properties of Single ZnO Nanowire at Room Temperature

作　　者：郑凯波[1] 李静雷[1] 沈浩颋[1] 孙大林[1] 陈国荣[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《物理化学学报》2008年第6期1080-1084,共5页Acta Physico-Chimica Sinica

基　　金：国家自然科学基金(10776004);上海市科委纳米专项基金(0752nm016);上海市重点学科建设(B113)资助项目

摘　　要：利用改进的CVD法制备了(002)面取向生长的ZnO纳米线,通过光刻/剥离的自下而上的组装技术制备了基于单根ZnO纳米线的气敏元件,其中的ZnO纳米线直径为50-300nm,有效长度为2-10μm.测试表明在室温条件下,元件对浓度为500μL·L-1的氧气和乙醇的灵敏度可以分别达到1.3和1.2,而气敏响应时间分别为10和5s,由于单根纳米线的一维小尺寸结构加剧了电流的自加热效应,因此元件在外界环境为室温的条件下的灵敏度才略有提高.ZnO nanowires with （002） oriented direction was synthesized via modified CVD method. Bottom-up assembly including photolithography/lift off was employed to fabricate gas sensor based on single ZnO nanwire with 50-300 nm in diameter and 2-10 μm in length. The as-prepared device showed gas sensitivities of 1.3 and 1.2 to oxygen and ethanol gases with concentration of 500 μL·L^-1 at room temperature, and the corresponding temporal responses were 10 and 5 s, respectively. The improved gas sensing properties were attributed to the enhancement of the current-induced heating on the quasi-one-dimensional nanostructure.

关 键 词：氧化锌 纳米线 气敏 

分 类 号：TB383.1[一般工业技术—材料科学与工程]