溶胶-凝胶法制备TiO2-SiO2多层增透膜  

Reflection Reducing Coating Composed of TiO_2-SiO_2 Multilayer Films Prepared Using Sol-Gel Processing

作　　者：王永强[1] 胡晓云[1] 苗仲海[1] 周引穗[1] 黄亚娜[1] 马一平[1] 

机构地区：[1]西北大学物理学系

出　　处：《光子学报》2008年第6期1165-1168,共4页Acta Photonica Sinica

基　　金：陕西省科技厅科技攻关项目(2004k05-G26)资助

摘　　要：在酸催化体系中以钛酸丁酯为前驱体制得TiO2溶胶，以正硅酸乙酯（TEOS）为前驱体制得SiO2溶胶，采用提拉法在普通载玻片上镀膜．辅助MASS膜系设计软件进行模拟计算，得到了透射比为99％的膜片．根据理论模拟结果，实验采用交叉镀膜，制备出了宽带增透TiO2-SiO2多层膜．用紫外可见分光光度计测量了样品的透射光谱．实验发现，样品具有明显的宽带增透效果：在400～700nm波段，当光线垂直入射时，增透5．5％左右；45°角入射时，可增透10％．Titanic oxide sol and silicon dioxide sol are obtained by hydrolysis and co-condensation reactions occurred in acid-catalyzed system by carefully controlling the sol-gel process of tetrabutylorthotitanate and tetraethoxysilane （TEOS）. They are coated on glass slides by dipping method. In virtue of the thin film designing software MASS, broadband reflection reducing coating composed of TiO2-SiO2 muhilayer films have been prepared. The transmission spectrum of the simulation is 99%. The transmission spectra of the samples are characterized by ultraviolet-visible speetrophotometer. For the ease of vertical incidence, the average transmission of the slide sample increases 5.5 % compared to the uncoated one in the spectra range from 400 nm to 700 nm,for 45°incidence the increase is 10%.

关 键 词：溶胶-凝胶法 增透膜 膜系设计 透射光谱 TiO2-SiO2多层膜 

分 类 号：O484[理学—固体物理]