微机械技术发展现状  

A Survey of Micro mechanical Technology

作　　者：才海男[1,2] 马秀兰 李鹏生 浦昭邦[1,2] 周兆英 

机构地区：[1]清华大学精密仪器系 [2]哈尔滨工业大学精密仪器系

出　　处：《哈尔滨工业大学学报》1997年第6期57-61,56,共6页Journal of Harbin Institute of Technology

摘　　要：介绍了微／纳米技术和微型机械技术这一新兴学科的重要意义、主要技术内容和当前国内外研究发展现状。This paper generally addresses a new aspect of science and technology,that is Nono/micro techniques and Micro mechanical techniques and their application in military affairs and defence.In this paper the main developments of Nano/micro and micro mechnical techniques at home and abroad are also introduced.

关 键 词：微型机械技术 微电机 微传感器 微执行器 

分 类 号：TH－39[机械工程]