脉冲偏压对(Ti，Al)N／TiN／(Ti，Al)N多层复合涂层成分和硬度的影响  

Effect of Pulse-Bias on Components and Micro-Hardness of (Ti,Al)N/TiN/(Ti,Al)N Multi-Layer Composite Coating

作　　者：毛延发[1] 唐为国[2] 兰新哲[1] 周廉[3] 韩培刚 

机构地区：[1]西安建筑科技大学,陕西西安710055 [2]兰州大学,甘肃兰州730000 [3]西北有色金属研究院,陕西西安710016 [4]深圳市广大纳米工程技术有限公司,广东深圳518172

出　　处：《稀有金属快报》2008年第6期12-16,共5页Rare Metals Letters

摘　　要：采用脉冲偏压多弧离子镀技术在Hss-Al高速钢上涂镀(Ti,Al)N/TiN(/Ti,Al)N多层复合涂层。所用设备为复合八阵弧离子镀膜生长系统。简要介绍了多层复合膜的镀层工艺过程。鉴于复合涂层中的Al含量对涂层的性能特别是抗磨损性能有极重要的影响,实验中重点考察了脉冲偏压幅对Al含量的影响。同时测试了复合涂层的Vickers硬度与偏压幅值的关系。研究结果得出,随着脉冲偏压幅值的增加,涂层中Al含量先增加,然后减少,偏压幅值为-150V时,Al含量高达36.41at%;偏压幅与涂层显微硬度的关系有相似的规律,在偏压幅值为-150V时,7层复合膜的Vickers硬度达2750MPa左右,10层复合膜的硬度约2880MPa。The （Ti, Al）N/TiN/（Ti, Al）N multi-layer composite coating on HSS-AL steel was prepared by pulse-bias arc ion plating technology, which the coating process was introduced. The effects of pulse-bias value on the aluminum content were explored emphatically due to Al content is a great influence on the wear resistance. Also the relationship between Vickers hardness and bias value was investigated. The results show that aluminum content increases first and then decreases with increasing pulse-bias, which reaches to the maximum value 36.41at% at about -15 V bias. And the relation between micro-hardness and bias value is the same, which the Vickers hardness of composite coating with 7 layers film is up to 2 750 MPa and 2 880 MPa with 8 layers at -150 V.

关 键 词：多弧离子膜 (Ti  Al)N/TiN/(Ti  Al)N 多声能复合涂层 维氏硬度 

分 类 号：O614.411[理学—无机化学]