三步酸蚀去钴对金刚石薄膜附着力影响的研究  

Study on Effect of Three-Step Acid Etching Co Pretreatment on Adhesion of Diamond Film on Cemented Carbide

作　　者：邢文娟[1] 汪建华[1] 王传新[1] 皮华滨[1] 陈宁[1] 

机构地区：[1]武汉工程大学等离子体化学与新材料重点实验室,湖北武汉430073

出　　处：《硬质合金》2008年第2期95-100,共6页Cemented Carbides

基　　金：湖北省科技攻关计划支持项目(项目编号2002AA105A02);湖北省教育厅2004年创新团队支持项目

摘　　要：用热丝化学气相沉积(HFCVD)制备金刚石薄膜涂层之前,采用两步酸腐蚀和三步酸腐蚀对WC-Co硬质合金(YG6)基体表面进行去Co预处理。SEM形貌观察、X射线衍射谱和EDAX能谱分析都表明,与两步腐蚀方法相比,三步酸腐蚀处理表面去Co效果更加好,沉积金刚石薄膜的压痕图更证实其对涂层质量的改善,并且该方法可以减少预处理时间,更适宜于工业生产。Acid etching Co pretreatment of WC-6%Co cemented carbide by two-step method and three-step method was studied respectively before coating preparation by hot-filament chemical vapor deposition （HFCVD）. The results of detection by scanning electron spoctroseopy, X-ray diffraction and EDAX energy spectrum show that the three-step method has better effect in etching Co pretreatment than two-step method. The indentation images of diamond fdms show that the coating quality is improved by the threestep method. Moreover, the three-step method reduces the time needed for pretreatment and is more suitable for industrial production.

关 键 词：硬质合金 金刚石薄膜 三步酸蚀法 两步酸蚀法 附着力 

分 类 号：TB383.2[一般工业技术—材料科学与工程]