薄膜涂覆过程中缺陷的形成及其防治措施的研究进展  

Progress on formation and prevention of defects in thin film coating

作　　者：刘赵淼[1] 金艳梅[1] 刘华敏[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100022

出　　处：《安全与环境学报》2008年第3期135-139,共5页Journal of Safety and Environment

基　　金：国家自然科学基金项目(10502002);北京市人事局"留学归国人员择优资助项目"

摘　　要：薄膜缺陷会降低薄膜器件的使用性能,因此薄膜缺陷的产生机理和防治措施研究非常重要。综述了薄膜涂覆中缺陷的分类及其形成,分析了产生缺陷的影响因素,并对主要缺陷的防治方法作了总结。对防治方法进行机理分析,总结了去除非连续缺陷过程中的注意原则。结果表明,薄膜缺陷分为连续性缺陷和非连续性缺陷,连续性缺陷最重要的影响因素是表面溶液的蒸发和表面张力的变化,可以通过设计涂覆溶液和涂覆模具最大程度地避免。非连续性缺陷中最主要的缺陷是气泡和杂质,气泡可以通过去气和去泡两种方式去除,杂质可以过滤去除。研究表明薄膜涂敷中缺陷防治需要从试验和数值计算着手,结合理论研究探讨产生缺陷的内在机理。This paper is aimed at classifying and summarizing the likely causes leading to the defects of thin film and the likely influential factors resulting in its defects in aviation, mechanical, electronic and optical devices to form striations, chatters as well as bubbles. As is widely known, thin film is widely applied in modern engineering, for example, in aviation, mechanical and electronic engineering and IT industry with its primary functions being wear-resisting, corrosionprevention, reducing reflections and water-proofing. However, its defects may lead to serious economic and materialistic losses and damage. It is for the purpose to raise the quality of the film by studying the ways to better prevention from such coating defects that we have made detailed investigation and summarization on the commonly happening defects with the thin coating film material and classified the defects concerned into two categories, i.e. the continuous and discrete defects, according to the their distribution locations. The defects can also be classified into those caused by surface tension of the coating solution, evaporation of superficial solution, and the stability of coating system, which can be thought of some chief influential factors quoted here but a few. The proposed method here on how to prevent the defect formation may also contribute to the improvement of the design schemes on coating solution and coating die as a result of the investigation we have done.

关 键 词：应用流体力学 涂覆 薄膜 缺陷 防治措施 

分 类 号：O368[理学—流体力学]