电涡流位移计在压电复合圆盘微位移测量中的应用  

Eddy-Current Displacement Sensor for Measuring Micro-Dis-placement of the Piezoelectric Ceramics Compound Disc

作　　者：黄爱芹[1] 孙宝元[2] 

机构地区：[1]滨州学院自动化系,山东滨州256603 [2]大连理工大学,辽宁大连116023

出　　处：《自动化技术与应用》2008年第6期70-72,共3页Techniques of Automation and Applications

摘　　要：压电复合圆盘在施加外加电压时会因为逆压电效应而产生位移,是一种理想的微执行器驱动元件。本文介绍了一种测量其尖端微位移的动态测量方法,本方法以ST-1型电涡流计作为位移传感器,用微机和数据采集卡来进行实时采集和处理数据;详细阐述了电涡流传感器的使用方法和使用过程,给出了测量实例。试验证明本方法可以准确快速的测量压电复合圆盘随电压的变化而产生的位移变化。Piezoelectric ceramics compound disc is an ideal driving component of the micro-actuator system. This paper presents a dynamic measuring method of its micro-displacement The eddy-current displacement sensor ST-1 is used to measure the tiny displacement, and a PC with the data acquisition card is used for data processing. It is proved that this method can accuratly measure the displacement changing with the applied voltage on the piezoelectric compound disc.

关 键 词：压电复合圆盘 微位移测量 电涡流传感器 

分 类 号：TH703.65[机械工程—仪器科学与技术]