Properties of TiAICrN coatings prepared by vacuum cathodic arc ion plating  

Properties of TiAlCrN coatings prepared by vacuum cathodic arc ion plating

作　　者：RU Qiang HU Shejun HUANG Nacan ZHAO Lingzhi QIU Xiuli HU Xianqi 

机构地区：[1]School of Physics and Communication Engineering, South China Normal University, Guangzhou 510006, China [2]Faculties of Materlals and Energy, Guangdong University of Technology, Guangzhou 510006, China [3]Shenzhen Goldenhouse Vacuum Technology Co., Ltd., Shenzhen 518053, China

出　　处：《Rare Metals》2008年第3期251-256,共6页稀有金属（英文版）

基　　金：This study is financially supported by the National Natural Science Foundation of China(No.50271019);the Scientific Planning Project of Guangzhou City(No.2003Z2-D2071);the Natural Science Foundation of Guangdong Province,China(No.05100534).

摘　　要：TiAlCrN coatings were deposited by means of vacuum cathodic arc ion plating technique on TC 11 （Ti-6.5Al-3.5Mo-1.5Zr-0.3Si） titanium alloy substrates. The composition, phase structure, mechanical performance, and oxidation-resistance of the nivide coatings were investi- gated by scanning electron microscopy （SEM）, atomic force microscope （AFM）, X-ray diffraction （XRD）, auger electron spectroscopy （AES）, and X-ray photoelectron microscopy （XPS）. A new process for preparing protective coatings of the titanium alloy is successfully ac- quired. The experimental results indicate that the added element chromium in the TiAlN coatings make a contribution to form the （220） pre- ferred direction. The phases of the coatings are composed of （Ti,Al）N and （Ti,Cr）N. After 700~C and 800~C oxidation, AES analysis shows that the diffusion distribution of the TiAlCrN coatings emerges a step shape. From the outside to the inner, the concentrations of O, Al, and Cr reduce, but those of Ti and N increase. The Al-rich oxide is formed on the surface of the coatings, and the mixed structure of Ti-rich and Cr-rich oxides is formed in the internal layer. The oxidation resistance of the TiAlCrN coatings is excellent at the range of 700 to 800~C. Adhesion wear is the dominant mechanical characteristic for the titanium alloy at room temperature, and the protective coatings with high hardness can improve the mechanical properties of the titanium alloy. The wear resistance of the TC 11 alloy is considerably improved by the TiAlCrN coatings.TiAlCrN coatings were deposited by means of vacuum cathodic arc ion plating technique on TC 11 （Ti-6.5Al-3.5Mo-1.5Zr-0.3Si） titanium alloy substrates. The composition, phase structure, mechanical performance, and oxidation-resistance of the nivide coatings were investi- gated by scanning electron microscopy （SEM）, atomic force microscope （AFM）, X-ray diffraction （XRD）, auger electron spectroscopy （AES）, and X-ray photoelectron microscopy （XPS）. A new process for preparing protective coatings of the titanium alloy is successfully ac- quired. The experimental results indicate that the added element chromium in the TiAlN coatings make a contribution to form the （220） pre- ferred direction. The phases of the coatings are composed of （Ti,Al）N and （Ti,Cr）N. After 700~C and 800~C oxidation, AES analysis shows that the diffusion distribution of the TiAlCrN coatings emerges a step shape. From the outside to the inner, the concentrations of O, Al, and Cr reduce, but those of Ti and N increase. The Al-rich oxide is formed on the surface of the coatings, and the mixed structure of Ti-rich and Cr-rich oxides is formed in the internal layer. The oxidation resistance of the TiAlCrN coatings is excellent at the range of 700 to 800~C. Adhesion wear is the dominant mechanical characteristic for the titanium alloy at room temperature, and the protective coatings with high hardness can improve the mechanical properties of the titanium alloy. The wear resistance of the TC 11 alloy is considerably improved by the TiAlCrN coatings.

关 键 词：TiAlCrN coatings ion plating wear and friction oxidation resistance titanium alloy 

分 类 号：TG13[一般工业技术—材料科学与工程]