一种新型高灵敏度光电微压传感器  

A Novel High-Sensitive Photoelectric Micro-Pressure Sensor

作　　者：郑为民[1] 钱浚霞[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室

出　　处：《仪器仪表学报》1997年第4期384-387,共4页Chinese Journal of Scientific Instrument

摘　　要：本文介绍一种高灵敏度光电微压传感器。它采用线性膜盒为敏感元件，以发光二极管和大面积硅差分光电二极管为光电元件，利用遮挡式光电变换结构，将检测所得的膜盒微量位移信号，通过电子线路和单片机处理，直接显示压力。传感器采用差动补偿和光反馈稳定等措施，消除光源波动及环境温度变化的影响，具有很好的稳定性。在未经微机校正时，传感器在０～６０００Ｐａ范围内，非线性误差小于０．３％，分辨力优于２０Ｐａ。This novel photoelectric micro-pressure sensor combines the photoelectronics technology,the single chip computer technology with the conventional pressure sensing element-a linear capsule.Fixed to the capsule is an opaque vane,which blocks the near infrared light impinging on the detection photodiode.The photo detector is a monolithic dual photodiode. The reference photodiode monitors the intensity of the light source-a light feedback stabilized LED unit,while the detection photodiode gives out the detection signal.Through this differential structure ,the displacement of the capsule is picked up and then processed by the electronic circuit and the single chip computer.Using the balanced detection method,the influence of the environmental perturbation can be eliminated.This sensor has excellent stability,linearity and high sensitivity.The minimum detectable pressure is less than 20Pa,and the nonlinearity error without correction is less than ±0 3% within the range of 6000Pa.

关 键 词：光电 压力传感器 关分光电二极管 

分 类 号：TP212.02[自动化与计算机技术—检测技术与自动化装置]