新型分子增压泵的性能测试  

Performance test for a new-type molecular/booster pump

作　　者：蒙峻[1] 杨晓天[1] 张素平[1] 储继国[2] 

机构地区：[1]中国科学院近代物理研究所 [2]深圳大学,广东深圳518060

出　　处：《真空》2008年第4期32-34,共3页Vacuum

基　　金：国家科学自然基金(编号:10675125)

摘　　要：本文详细介绍了新型分子增压泵的测试方法,对分子增压泵的极限真空、返油率、抽速及工作频率等性能进行了测试分析。测试结果表明,该泵可以在过渡流段替代罗茨泵来获得清洁真空系统。在兰州重离子加速器TR2终端真空差分系统前两级选用了新型分子增压泵,并根据测试结果确定其工作频率。最后给出了在TR2终端真空差分系统使用分子增压泵后的实验结果,表明该泵能够满足清洁、大流量差分真空系统的使用要求。A test method for a new-type molecular/boster pump is introduced in detail so as to analyze its ultimate pressure, oil back-streaming rate, pumping speed and operating frequency. The test results indicated that the new-type pump can be used in transitional flow instead of Roots pump to acquire clean vacuum system. The pumps are chosen in the two preceding stages of the TR2 terminal differential vacuum system of Lanzhou Heavy Ion Accelerator with operating frequency confirmed according to the test results which are given to indicate that the new-type pump is available to meet the vacuum requirement of a clean and large-throughout differential system.

关 键 词：清洁、大流量差分系统 新型分子/增压泵 返油率 残余气体分析 抽速 

分 类 号：TB752.27[一般工业技术—真空技术]