迈克尔逊干涉仪测量薄膜的折射率与厚度  

Refractive Index and Thickness of Michelson Interferometer Measure Film

作　　者：杨修文[1] 石义杰[1] 路素彦[1] 

机构地区：[1]郧阳师范高等专科学校物理系,湖北丹江口442700

出　　处：《郧阳师范高等专科学校学报》2008年第3期26-27,共2页Journal of Yunyang Teachers College

基　　金：湖北省教学研究资助项目(2003298)

摘　　要：用迈克尔逊干涉仪测量薄膜折射率与厚度的方法,原理简单.通过测出动镜的移动量及观察相应的干涉条纹变化现象,就能计算薄膜的厚度,有较高的测量精度.并基于此装置进行实际测量,理论和实际相符的较好.This paper has introduced the easy and simple method to determine film refractive index and thickness by Michelson interferometer. The film thickness of high precision can be determined by determining the motion quantity of moving mirror and observing the relevant interference fringe, on which actual determination has been carried out, whose theory and practice conform to each other.

关 键 词：迈克尔逊干涉仪 薄膜厚度 干涉条纹 

分 类 号：O436.1[机械工程—光学工程]