电化学乙醇气体敏感元件及其敏感特性研究  

Study of Electrochemical Ethanol Gas Sensor and Its Sensitive Characteristics

作　　者：曾庆丰[1] 邓永和[2] 

机构地区：[1]贵州大学理学院,贵阳550003 [2]湖南工程学院数理系,湖南湘潭411104

出　　处：《微纳电子技术》2008年第7期416-418,431,共4页Micronanoelectronic Technology

基　　金：湖南省教育厅科研基金资助项目(05C578)

摘　　要：在WO3粉体材料中加入一定质量比的添加剂(Pt、Pd、PtO2、PdCl2、SnO2、SiO2、Al2O3),恒温600℃烧结1h制成旁热式厚膜乙醇气体敏感元件。采用静态电压测量法,研究了元件的加热电压与元件灵敏度β的关系以及添加剂对元件的响应与恢复时间的影响。实验结果表明:乙醇的气体体积分数为10-3,WO3元件掺入质量分数为0.5%的PdCl2,在加热功率为600mW下元件的响应与恢复时间分别为9.0s和11.0s,与纯WO3元件相比元件的灵敏度提高了约8倍。The indirectly heated thick film ethanol gas sensor was prepared by dispersing additives （Pt, Pd, PtO2, PdCl2, SnO2, SiO2 and Al2O3） at a certain mass ratio into WO3 powder and heating at 600℃ for 1 h. Based on the static voltage measure method, the relationship between the heating voltage and the sensitivity of sensor, the influence of different additives on response and recovery time were researched. The results show that the response and recovery time of WO3 sensor with 0.5% mass fraction PdCl2 are 9.0 s and 11.0 s with ethanol gas volume fraction of 10^-3 , shows less, respectively, and 8 times higher than that of pure WO3 at heat power of 600 mW.

关 键 词：乙醇气体敏感元件 灵敏度 添加剂 电化学 响应与恢复时间 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]