ZSH5型自动砂轮划片机控制系统的设计与实现  

The Design and Realization for Control Program of ZSH5 Automatic Dicing Saw

作　　者：张明明[1] 白宇[1] 

机构地区：[1]沈阳仪表科学研究院,沈阳110043

出　　处：《电子工业专用设备》2008年第7期49-51,共3页Equipment for Electronic Products Manufacturing

摘　　要：介绍了ZSH5型自动砂轮划片机控制系统的设计路线和框架结构,以及一些重要功能模块的实现方法和特点。总结了一些精密半导体专用设备的开发经验,为设计和开发机电设备的控制系统提供一些思路和方法。This paper introduces the design way and structure for the control system of ZSH5 Automatic Dicing Saw, as well as the characteristic of some important modules. Experience of developing semiconductor manufacturing equipments is also summarized, which indicates a path to design the control program of electromechanical equipments.

关 键 词：ZSH5型划片机 模块化设计 闭环控制 

分 类 号：TN305.1[电子电信—物理电子学]