基于光栅投影的轮廓测量改进方法  

Improved method for three-dimensional profile measurement based on grating projection

作　　者：程音[1] 于德敏[1] 许增朴[1] 王永强[1] 

机构地区：[1]天津科技大学机械工程学院,天津300222

出　　处：《应用光学》2008年第4期619-624,共6页Journal of Applied Optics

基　　金：天津市自然科学基金资助项目(013602211)

摘　　要：传统傅里叶变换轮廓方法(FTP)在测量表面突变的物体时,受物体高度变化所引起的非截断相位变化的影响,相位难以正确展开。利用双频光栅投影可以解决这一问题。在总结了传统测量方法与双频光栅测量方法的基础上,提出采用彩色复合光栅投影的测量方法。该方法只需一次采集,就能消除图像背景分量与高次分量对测量的影响,在扩大测量范围的同时可达到双频技术测量突变效果。最后,对3种方法的实际测量结果作了对比分析,证明彩色复合光栅投影方法得到的测量精度最高。The traditional Fourier transform profilometry （FTP） is not applicable to unwrap the wrapped-phase correctly when the depth continuity phase of the detected object is interrupted by its abrupt height change. The problem can be solved by using the two-frequency grating projection. By summarizing the traditional measurement method and the two-frequency grating measurement method, a novel technique based on the color composite grating projection was introduced, which could eliminate the effects of the background spectra and high-order components on the measurement with only one collection, expand the scope of measurement, and solve the problem of phase interruption. The measured results of the three methods were analyzed and compared. It shows that the accuracy of the color composite grating projection method is the best.

关 键 词：三维轮廓测量 彩色复合光栅 傅里叶变换 相位展开 

分 类 号：TN942.1[电子电信—信号与信息处理]