石英挠性加速度计中高精度低零偏伺服电路的设计  

High-Precision and Low-Drift Servo Circuit for Q-FLEX Accelerometer

作　　者：易文翠[1] 唐丽均[1] 胡银全[1] 

机构地区：[1]重庆通信学院地管部网络与嵌入式系统实验室,重庆400035

出　　处：《工业控制计算机》2008年第7期88-89,共2页Industrial Control Computer

摘　　要：介绍了一种用于石英挠性加速度计的伺服电路。通过对内部的差动电容检测器进行激光修调,使该伺服电路的零偏电流小于1.33μA。低零偏电流的特点大大地提高了本伺服电路响应加速度时输出电流的精度,即提高了所检测加速度值的精度。A servo-circuit of Q-FLEX accelerometer is introduced in this paper.By laser trimming the differential capacitance amplifier,the offset current of circuit is reduced to under 1.33μA.So offset current can improve the precision of output current of circuit when it is forced by an acceleration,in other words, it can improve the precision of the acceleration which detected by the circuit.

关 键 词：加速度计 伺服电路 差动电容检测器 零偏电流 

分 类 号：TH824.4[机械工程—仪器科学与技术]