一种基于平膜片挠度的光纤光栅压力传感器  

Fiber Bragg grating pressure sensor based on the deformation of flat diaphragm

作　　者：张文涛[1] 刘育梁[1] 李芳[1] 

机构地区：[1]集成光电子学国家重点实验室,中国科学院半导体研究所,北京100083

出　　处：《光电子．激光》2008年第7期899-901,共3页Journal of Optoelectronics·Laser

摘　　要：设计并实现了一种基于平膜片挠度的光纤光栅压力传感器,该压力传感器利用一个L型的杠杆机构将膜片的挠度转换为光纤光栅的轴向应变,在提高传感器灵敏度的同时避免了对光纤光栅栅区直接封装造成的应力分布不均匀。实验结果表明,该传感器具有良好的线性度和稳定性,其压力灵敏度系数达10.4 nm/MPa。A novel fiber Bragg grating（FBG） pressure sensor based on the deformation of flat diaphragm is proposed.An L-shaped curved lever is employed to transfer the deformation of the flat diaphragm to the FBG and induce the axial strain in the FBG.The experimental results show that the sensor has good linearity and stability,and an ultra high sensitivity of 10.4nm/MPa has been achieved.

关 键 词：光纤光栅 膜片 挠度 压力 

分 类 号：TN253[电子电信—物理电子学]