同基共模抑制石英晶体谐振器研究  

Research on same-base common-mode rejection quartz crystal resonator

作　　者：田文杰[1] 李跃宏[2] 霍静[1] 田双[1] 田强[3] 

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]云南广播电视大学,昆明650000 [3]北京师范大学物理系,北京100875

出　　处：《仪器仪表学报》2008年第8期1650-1653,共4页Chinese Journal of Scientific Instrument

基　　金：北京市自然科学基金(4082011);北京市科技发展基金(KM200610772009);北京(传感器)重点实验室开放课题基金资助项目

摘　　要：在分析AT切石英晶体谐振器力敏特性及晶体内振动波传播特点的基础上，研究了同一晶体基片上的多个谐振器的力敏特性。根据共模抑制原理，将同一晶体基片上不同位置的谐振器对应的谐振频率作混频处理，并以差频形式输出，以此消除相关干扰因素对谐振器输出频率的影响。实验结果表明，AT切同基三电极石英晶体谐振器差频输出的力敏特性是传统的单基单电极谐振器力敏特性的1．3倍；同基四电极谐振器的力敏特性则略小，但可同时获得两组输出；同基多电极谐振器的频率稳定性均可达10^-10。的量级；在-50～60℃内，相对频率变化约为±5×10^-6。The force sensitive characteristics of multi-resonators assembled on one crystal are studied based on analyzing the force sensitive characteristics of AT-cut quartz crystal resonators and the interior vibration wave transmission in crystal. According to common-mode rejection theory, the resonance frequencies of the resonators on different places are processed by means of frequency mixing; and the output is the difference frequency, which eliminates the influence of correlation disturbance factors. Experiment results show that the force sensitivity coefficient of three-elec- trode AT-cut quartz crystal resonator in the same base is 1.3 times of that of traditional single-base centered single- electrode resonator. For same-base four-electrode resonator, there are two outputs, and its force sensitivity coefficient is slightly smaller. The frequency stability of same-base multi-electrode quartz resonator can reach to 10^-10 and the relative frequency variation is about±5×10^-6 in the temperature range of -50 ℃ to 60℃.

关 键 词：共模抑制 石英晶体 同基多电极谐振器 

分 类 号：TH703.2[机械工程—仪器科学与技术]