光纤共焦干涉显微成像系统轴向响应特性  

The axial-response property of optic-fiber confocal interference microscopy system

作　　者：邹丽敏[1] 李溪[1] 丁雪梅[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150080

出　　处：《光电子．激光》2008年第8期1027-1031,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(50675052)

摘　　要：以光纤共焦干涉系统的三维传递函数和轴向响应特性为基础,分析和研究了光纤光斑尺寸、瞳半径,探测器尺寸、光纤与透镜的匹配等对该系统轴向分辨率的影响。实验表明,为使系统获得较高的轴向分辨率,需控制与光纤光斑尺寸有关的参数A小于4,并使透镜的数值孔径小于光纤数值孔径;优化后系统轴向响应的半高宽仅为光纤共焦系统的1.1%。The axial-resolution is an important parameter of the optical-fiber confocal interference microscopy system （FOCSIM） ,which directly determined the measurement accuracy of the system. The Michelson interference principle was employed in the novel FOCSIM for the axial-resolution improvement. Based on the three-dimension transfer function and axial response property,the axial-resolution of FOCSIM is analyzed in this paper by the effect of fiber spot size,pupil radius, size of detector and matching of fiber and lens. ）＇or the axial resolution improvement purpose,the parameter A of fiber pro- file spot size should be less than 4 and the numerical aperture of the lens should be smaller than that of fiber-optical. The experiment result indicated that the optimized half-height width of axial response is only 1.1% of optical-fiber interference system.

关 键 词：光纤共焦干涉 系统参数 轴向分辨率 干涉条纹可见度 

分 类 号：TN253[电子电信—物理电子学]