Ultrafast thermoelasticity modeling of microbump formation irradiated by femtosecond laser  

作　　者：韩泽华 周常河 戴恩文 

机构地区：[1]Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2008年第8期619-621,共3页中国光学快报（英文版）

基　　金：the Shanghai Science and Technology Committee (No.06SP07003 and 0652nm005);the National"973"Program of China (No.2006CB806000).

摘　　要：Finite element method and ultrafast thermoelasticity model are combined to simulate the microbump formation irradiated by a femtosecond laser. It has been shown that the effect of microbump formation is related to the characteristic of incident femtosecond laser and the thermoelasticity properties of the film. The numerical results exhibit good agreements with the experimental results in both the shape and height of the conical microbump structure, which verify the effectiveness of the ultrafast thermoelasticity model in experiments. It should be helpful for selecting appropriate materials for nanotexturing of thin films by ultrafast lasers.Finite element method and ultrafast thermoelasticity model are combined to simulate the microbump formation irradiated by a femtosecond laser. It has been shown that the effect of microbump formation is related to the characteristic of incident femtosecond laser and the thermoelasticity properties of the film. The numerical results exhibit good agreements with the experimental results in both the shape and height of the conical microbump structure, which verify the effectiveness of the ultrafast thermoelasticity model in experiments. It should be helpful for selecting appropriate materials for nanotexturing of thin films by ultrafast lasers.

关 键 词：ELASTICITY Films LASERS Pulsed laser applications THERMOELASTICITY Thick films Ultrashort pulses 

分 类 号：TN24[电子电信—物理电子学]