Ag-MgO复合团簇薄膜微结构及其光学特性  

Microstructure and Optical Properties of Ag-MgO Composite Cluster Films

作　　者：吕建国[1] 伍红松[1] 陈磊[1] 宋学萍[1] 孙兆奇[1] 

机构地区：[1]安徽大学物理与材料科学学院

出　　处：《硅酸盐通报》2008年第4期843-846,856,共5页Bulletin of the Chinese Ceramic Society

基　　金：国家自然科学基金(50642038);教育部博士点专项基金(20060357003);安徽省人才专项基金(2004Z029);安徽科技厅重点项目(07020203009);安徽省高等学校省级自然科学研究项目(KJ2007B135);安徽省高等学校青年教师科研资助计划项目(2006jql192);安徽大学人才队伍建设基金资助课题

摘　　要：用射频-磁控共溅射技术制备出Ag体积分数分别为5%,10%,15%和20%的Ag-MgO复合团簇薄膜。用X-射线衍射仪、原子力显微镜和紫外-可见分光光度计研究了复合团簇薄膜的微结构、表面形貌和光学性质。结果表明:随着Ag体积分数从5%增大到20%,薄膜中Ag的平均晶粒尺寸由8.2nm增大到10.9nm,薄膜的平均颗粒尺寸从37.9nm增大到43.4nm,方均根(rms)粗糙度先减小后略有增大,可见光范围内的平均透过率先下降后几乎保持不变。Microstructure, surface topography and optical property of Ag-MgO composite cluster films with the silver volume fraction of 5%, 10%, 15% and 20%, grown by radio frequency magnetron cosputtering process, were analyzed by X-ray diffraction, atomic force microscope and ultraviolet-visible spectrometer. The results show that when the volume fraction rises from 5% to 20%, the average crystalline grain size of silver increases from 8.2 nm to 10.9 nm, the average particle diameter changes from 37.9 mn to 43.4 nm, rms roughness monotonically decreases to a valley, and then increases, the averagee transmissivity of visible spectrum decreases to a stable value.

关 键 词：Ag—MgO复合团簇薄膜 微结构 表面形貌 光学性质 

分 类 号：O484[理学—固体物理]