用于大范围纳米级压电微动台的驱动控制系统  

Driving and controlling system of piezoelectric micro-moving platform with long-range in Nano-resolution stage

作　　者：胡长德[1] 温丽梅[2] 幸祺[3] 

机构地区：[1]装备指挥技术学院,北京102200 [2]中国民航大学航空自动化学院航空电器系,天津300300 [3]中国卫星海上测控部,江阴214431

出　　处：《电子测量技术》2008年第8期37-40,66,共5页Electronic Measurement Technology

基　　金：国家自然科学基金项目:大范围实用型二维纳米定位控制及测量技术(50105016)

摘　　要：介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。根据其运动原理特点,设计完成了该压电微动台的控制系统。在电压控制下,利用压电陶瓷的逆压电效应,通过机械装置将压电陶瓷的微小位移输出,达到精密定位的目的。最后对该控制系统进行了性能测试。实验表明,该控制系统所产生的三角波、方波信号纹波电压小,信号稳定,其中放大电路部分放大倍数为57,能够驱动所选用的压电陶瓷,满足微动台驱动要求。A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper. As to the characteristic of the piezoelectric platform, a kind of driving and controlling system is proposed. The micro-displacement of the piezoelectric actuator is transferred by the machine in order to make use of precise positioning. This result has been verified several times by experiments. The experiments show that both the triangle wave and the square wave are steady going and with little ripples, of which the amplificatory multiple is about 60.

关 键 词：纳米级 大范围 尺蠖运动 压电陶瓷 控制系统 

分 类 号：TN384[电子电信—物理电子学]