K^＋-Na^＋和Ag^＋-Na^＋两步离子交换技术制作玻璃基光波导研究  

Optical Waveguide Based on Glass by Technology of K^+-Na^+ and Ag^+-Na^+ Two-step Ion-exchange

作　　者：李锡华[1] 金宁[2] 宫汝振[1] 杨建义[1] 江晓清[1] 王明华[1] 

机构地区：[1]浙江大学信息与电子工程学系,杭州310027 [2]中国计量学院信息分院,杭州310018

出　　处：《光子学报》2008年第8期1520-1523,共4页Acta Photonica Sinica

基　　金：浙江省科学技术厅研究计划(2004C21049);浙江省自然科学基金(Y105088)资助

摘　　要：利用K+-Na+和Ag+-Na+两步离子交换得到掩埋型光波导.该方法抑制Ag+-Na+离子交换时产生的Ag+微粒,降低波导损耗,增加波导截面的圆对称性,从而提高光波导器件的性能.用该方法制作了1×8光功分器,其插入损耗平均为10.9dB.A buried waveguide was obtained by the two-step of K^＋-Na^＋ and Ag^＋-Na^＋ ion-exchange. This method can restrain the growth of silver clusters appearing during the process of Ag^＋-Na^＋ ion-exchange, and then the loss of waveguide can be reduced. In this case the symmetry of waveguide section and the performance of optical devices can be improved. A 1 × 8 optical splitter is fabricated,its average insert loss is 10.9 dB.

关 键 词：集成光学 玻璃光波导 离子交换 光功分器 

分 类 号：TN252[电子电信—物理电子学]