用QCM分析ZnO纳米线在湿度检测中的响应  

The Response of the Nanostructured ZnO to the Relative Humidity Based on QCM

作　　者：吕家云[1] 张健[2] 周晓峰[2] 

机构地区：[1]巢湖学院物理系,安徽巢湖238000 [2]华东师范大学电子科学技术系,上海200062

出　　处：《压电与声光》2008年第5期631-633,共3页Piezoelectrics & Acoustooptics

基　　金：上海市浦江人才计划基金资助项目(06PJ14037);传感器国家重点实验室开放基金资助项目(Skt0604)

摘　　要：研究石英晶体微天平传感器上涂敷纳米ZnO膜,实现对湿度检测。实际测试结果涂敷纳米ZnO膜的石英晶体传感器在一定湿度范围的输出频率随测试的相对湿度变化。研究结果表明在湿度检测中,相对湿度越高,响应时间越长;涂敷膜越厚,频率变化越大,在相同的湿度下(高湿度)响应时间越长。This paper describes a research of quartz crystal microbalances （QCM） coated with nanocrystalline ZnO used as relative humidity sensors. Sensing experiments were examined by measuring the resonance frequency shift of QCM which due to the additional mass loading when the QCM in the different relative humidity atmosphere. The results showed that the higher relative humidity, the longer the response time, and in the same high relative humidity, the more ZnO is coated, the longer response time is.

关 键 词：石英晶体微天平 纳米ZNO 相对湿度 响应时间 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]