光电测量二维微角位移的新方法研究与实现  

Research and Realization of new opto-electronic measurement method for two dimensions tiny angular displacement

作　　者：罗钧[1] 万文通[1] 卢嘉江[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400030

出　　处：《传感器与微系统》2008年第8期51-53,共3页Transducer and Microsystem Technologies

摘　　要：为了解决对旋转台定位精度校准的同时又能对其台面俯仰角度进行测量的问题,提出了一种光电测量二维微角位移的新方法。在激光自准直光路中,采用数字信号处理器(DSP)获取准直物镜焦平面上V字形分划板在自扫描光电二极管阵列(SSPA)上两次成像之间的位移量,根据光学成像原理与像的外形特征,建立了像的平面位移量与被测物体二维角位移量的关系式,从而计算出角位移量。此方法的测量精度达到0.9″,满足旋转台校准的需要。For solving the problems of calibration of the turntable position accuracy and measurement of its pitch angle at the same time, a new method for measuring two dimensions tiny angular displacement is proposed. In optical path of the laser autocollimation, DSP and self scanned photodiode array （SSPA） are used to capture the moved displacement of the image of V shape graduation which fixed in the focal plane. Based on the principle of optical imaging and the form of image, the incidence relation between the displacement and a angle is established. A measurement accuracy of 0.9″ can be achieved, and the requirements for calibrating turntable can be met.

关 键 词：二维微角位移 激光自准直 数字信号处理器 自扫描光电二极管阵列 V形分划板 

分 类 号：TH712[机械工程—测试计量技术及仪器]