切角方柱压电超声微电机的研制  

Cubic micro-ultrasonic motor with truncated edge

作　　者：刘涛[1] 陈宇[1] 路凯[1] 周铁英[1] 

机构地区：[1]清华大学物理系,北京100084

出　　处：《清华大学学报（自然科学版）》2008年第8期1229-1232,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(50577035;10676015);国家"八六三"高技术项目(2006AA02Z472)

摘　　要：为了减小超声微电机的尺寸、简化加工工艺,研制了0.8mm切角方柱压电超声微电机,并对它进行了稳定性讨论和有限元仿真。压电方柱断面的极化电场分布不均匀,考虑极化电压对压电常数的影响,通过有限元数值仿真,优化计算得到了最优切角。当驱动电压峰峰值为65V时,样机的无载转速为2460r/min,堵转力矩为3.5μNm。该电机已用于光学相干断层扫描内窥镜系统中,对鸡食道进行离体成像,其横向分辨率为30μm。A cube shaped micro-ultrasonic motor with truncated edge was developed to minimize the micro motor size and simplify its fabrication. The motor stability was analyzed using a finite element analysis. Since the distribution of the polarized electric field was not uniform, the influence of the polarization voltage on the piezoelectric coefficient was taken into consideration to find the optimal size of the truncated edge. The no-load rotational speed is 2 460 r/min and the stall torque is about 3. 5 μNm, when the peak drive voltage is 65 V. The motors were used in a prototype optical coherence tomography （OCT） endoscope. Analysis of a chicken esophagus in vitro gave a lateral resolution of 30 9m.

关 键 词：超声微电机 光学相干断层扫描 内窥镜系统 有限元分析 

分 类 号：TM35[电气工程—电机]