薄膜型TMA气体传感器的研制  

Fabrication of Thin Film Gas Sensor for Detecting Fish Frishness

作　　者：管玉国[1] 戴国瑞[1] 南金[1] 朱勇 

机构地区：[1]吉林大学电子工程系

出　　处：《传感技术学报》1997年第4期38-43,共6页Chinese Journal of Sensors and Actuators

摘　　要：本文报道了采用等离子体CVD方法制备Fe^2O^3/TiO^2薄膜材料,并用浸渍法对表面修饰了In,制成了检测鱼鲜度了TMA的薄膜气体传感器,并具有很好的灵敏度、选择性、稳定性和响应、恢复特性。Fe2O3-TiO2 thin films were prepared by means of plasma enhanced chemical vapour deposition methods and the film surface were modified by means of soaked technique with indium. Thin films gas sensors were fabricated for detecting trimethylamine gases. The sensitivity, selectivity, stability and respose-restoring characteristics of film sensors are all excellent.

关 键 词：气体传感器 TMA气体 表面修饰 传感器 敏感器件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN379[自动化与计算机技术—控制科学与工程]