振动对长程面形仪静态稳定性的影响  

Static stability of a long trace profiler against vibrations

作　　者：孙晖[1] 罗红心[1] 肖体乔[1] 徐洪杰[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《核技术》2008年第9期658-662,共5页Nuclear Techniques

摘　　要：研究了振动对新型长程面型仪(Long Trace Profiler,LTP)静态稳定性的影响。根据新型长程面形仪的光学结构建立模型,分析了LTP对环境振动的响应,证明了仅垂直方向振动会导致LTP测量误差。接着采用频率和强度可控的振动发生源,通过对比实验测量振动对LTP静态稳定性的实际影响,实验结果与理论分析相符,证明了仅垂直方向一定频率范围内的振动会影响LTP的静态稳定性。The effects of vibration on static stability of a long trace profiler （LTP） was studied in this paper. A model on optical principle of a new LTP was established, and the LTP＇s response to environmental vibration was analyzed. It was found that only vertical vibration causes errors of LTP measurement. By using a vibration generator with controllable frequency and intensity, vibration effects on the LTP static stability were checked through contrast experiments. The results indicate that only vertical vibration frequency in a certain range can affect the LTP static stability. This is consistent with the theoretical analysis.

关 键 词：长程面形仪 振动 静态稳定性 

分 类 号：O434.12[机械工程—光学工程]