γ-Fe2O3/硅纳米孔柱阵列湿敏元件的湿敏性能研究  

Humidity Sensing Properties of γ-Fe_2O_3/Silicon Nanoporous Pillar Array Humidity Sensor

作　　者：王海燕[1] 李隆玉[2] 董永芬[2] 李新建[2] 

机构地区：[1]郑州轻工业学院技术物理系,郑州450002 [2]郑州大学物理工程学院,教育部重点实验室,郑州450052

出　　处：《传感技术学报》2008年第7期1093-1096,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(10574112)

摘　　要：利用匀胶旋涂技术,将微乳-水热法制备出的、粒径均匀可控的γ-Fe2O3纳米颗粒沉积在具有独特微纳双重结构的硅纳米孔柱阵列(Si-NPA)基片上,制成γ-Fe2O3/Si-NPA湿度传感元件,并对其进行湿度感应测试结果发现,当环境相对湿度(RH)从11%升高到95%时,该元件的电容和电阻分别呈高灵敏度的单值增加和单值降低。在100 Hz的电流频率下,元件的高湿电容值升为低湿电容值的12 500%,低湿电阻值是高湿电阻值的51 515%。分析表明,微乳-水热法对γ-Fe2O3纳米颗粒尺寸的控制以及Si-NPA衬底的独特结构是提高元件灵敏度的主要原因。γ-Fe2O3 nanocrystals were deposited on the silicon nano-porous pillar array （Si-NPA） template which has special micro-nano hierarchical structure to prepare a γ-Fe2O3/Si-NPA humidity sensor. The size of γ-Fe2O3 nanocrystal could be controlled by a new chemical method of microemulsion and hydrothermal. Room temperature capacitive and resistive sensitivity of this γ-Fe2O3/Si-NPA sensor was investiga- ted. The sensor＇s capacitance and resistance are very sensitive to humidity. When the relative humidity （RH） changed from 11% to 95%, the sensor＇s capacitance showed a great increment of 12 500% and its resistance showed a great fall of 51 515% at the signal frequency of 100 Hz. The high performances of the γ-Fe2O3/Si-NPA sensor are explained on the basis of the surface structure contributed by the microemul- sion and hydrothermal method and the Si-NPA template.

关 键 词：Γ-FE2O3 硅纳米孔柱阵列 湿度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]