微型笔直写技术制备厚膜温度传感器阵列研究  

Study on thick-film temperature sensor array fabricated by micropen direct-writing technology

作　　者：蔡志祥[1] 李祥友[1] 胡乾午[1] 曾晓雁[1] 

机构地区：[1]华中科技大学光电子科学与工程学院武汉光电国家实验室(筹)激光部,湖北武汉430074

出　　处：《电子元件与材料》2008年第9期18-21,共4页Electronic Components And Materials

基　　金：国家"863"计划资助项目(No.2006AA04Z313);国家自然科学基金资助项目(No.50575086)

摘　　要：利用微型笔直写技术，在Al2O3陶瓷基板上制备了4×4厚膜PTC热敏电阻温度传感器阵列。研究了驱动气压、笔嘴直径以及直写速度等对厚膜PTC热敏电阻线宽的影响，分析了微型笔直写PTC热敏电阻温度传感器的形成机理。目前微型笔在Al2O3陶瓷基板上直写的厚膜PTC热敏电阻线宽为130-400μm。高温烧结后其电阻温度系数啄为1620×10^-6／℃，在25～95℃之间电阻阻值随温度的变化具有良好的线性。4×4 thick-film PTC thermistor temperature sensor array on Al2O3 ceramic substrate was prepared using micropen direct-writing technique. The effects of driving gas pressure, the diameter of nozzle, and direct writing speed on thick-film PTC thermistor line width were studied systematically. And the mechanism of PTC thermistor temperature sensor formation was analyzed. Now, the line width of thick-film PTC thermistor on Al2O3 ceramic substrate by micropen direct writing is 130-400μm. After sintering of high temperature, its αR is 1 620×10^-6/ ℃, and the dependence of resistance versus temperature between 25 ℃ and 95 ℃ is good linearity.

关 键 词：电子技术 微型笔 温度传感器阵列 直写技术 热敏电阻 

分 类 号：TM24[一般工业技术—材料科学与工程]