表面波型微波感耦常压氩等离子体的光谱诊断  

SPECTROSCOPIC DIAGNOSTIC OF ATMOSPHERIC PRESSURE ARGON MICROWAVE INDUCED PLASMA

作　　者：杨灿珠[1] 普小云[1] 林理忠[1] 文小明[1] 徐慧[2] 

机构地区：[1]云南大学物理系 [2]昆明徐慧云南大学实验中心

出　　处：《光谱学与光谱分析》1997年第6期40-44,共5页Spectroscopy and Spectral Analysis

摘　　要：由Ｓｕｒｆａｔｒｏｎ在常压下获得了稳定的微波感耦氩等离子体。用光学多道分析仪研究了该等离子体随实验参数变化的光谱辐射及氩原子亚稳态（ｌＳｊ，ｊ＝２，３，４，５）特性。讨论了该等离子体的激发生成机制。Atmospheric argon microwave induced plasma(Ar MIP) sustained by a surfatron was obtained.Emission spectra and characteristics of argon metastable(1S j) were studied with an optical multichannel analyer(OMA 3,1460)under different experimental condition.Excitation mechanism of the plasma was discussed.

关 键 词：常压 Ar-MIP 氩等离子体 亚稳态 激发机制 

分 类 号：O613.13[理学—无机化学]