泰曼-格林干涉仪测量液晶空间光调制器的相位调制特性  

Phase Modulation of Liquid Crystal Spatial Light Modulator Measured by a Twyman-Green Interferometer

作　　者：张洪鑫[1] 张健[1] 吴丽莹[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所

出　　处：《中国激光》2008年第9期1360-1364,共5页Chinese Journal of Lasers

摘　　要：为了评价美国BNS公司反射式256 pixel×256 pixel纯相位液晶空间光调制器(LC SLM)的性能,提出利用泰曼-格林干涉仪对相位调制特性进行干涉测量。实验结果表明,液晶空间光调制器的相位随灰度呈非线性分布,利用反插值法建立线性查找表,校正了器件的非线性,非线性度由原来的17.23%减小到2.85%;中心与边缘的相位调制,在同一灰度级最大相位差达到0.22π,中心相位调制均方根误差是边缘的4倍,说明该器件存在相位调制的不均匀性,中心相位误差较大,在波前控制中应给予校正。In order to evaluate the performance of a reflective 256 pixelX 256 pixel phase-only liquid crystal spatial light modulator （LC SLM） from American BNS Company, interference measurements are proposed on the characteristics of phase modulation using a Twyman-Green interferometer. Experimental results indicate that the relation between phase and gray level is nonlinear. A linear look up table is established by inverse interpolation to correct the nonlinearity for this device. The nonlinearity decreases to 2.85% from 17.23 %. The phase difference between the centre and the edge is 0.22π on the equal gray level and the root-mean-square error of phase modulation for the centre is 4 times of that for the edge, which shows the phase modulation for this device is nonuniform and the phase error for the centre should be corrected in wave-front control application.

关 键 词：测量 空间光调制器 泰曼-格林干涉仪 相位调制 

分 类 号：TN761[电子电信—电路与系统]